Precision double-sided grinding and polishing machine

  1、 Overview of Machine Usage
This machine is widely used for precision double-sided grinding/polishing of large-sized wafers, piezoelectric crystals, compound semiconductors, silicon crystals, optical glass, and other hard and brittle materials.
This machine uses a 30 inch planetary wheel carrier,φ Each 300mm wafer can produce 15 pieces,φ Each 200mm wafer can produce 30 pieces.
 
2、 Machine Structure Description
This machine has undergone significant improvements in terms of customer usage requirements, operator habits, overall stability, and performance. The upper grinding disc crossbeam has been replaced with a single-sided rotatable gantry structure.
The entire machine frame, crossbeam, and column are welded with high-strength steel plates, and the central axis bearing component is made of cast iron, making the entire machine more rigid and stable.
The rise, fall, slow rise, and slow fall of the grinding disc are controlled by a single handle, making the operation simple and convenient.
The upper disc adopts a dual cylinder structure, with the main cylinder responsible for lifting and lowering the upper grinding disc, and the auxiliary cylinder responsible for processing and pressurizing.
The machine transmission gear adopts high-strength quenched gear, with a gear accuracy of GB-6HK, and the material is made of 45 # steel high-frequency quenched. Ensuring stability, wear resistance, as well as the rigidity and operational accuracy of the overall transmission of the machine.
The upper, lower, and inner gear rings of the machine are synchronously driven by a main motor, which can control the working speed ratio according to process requirements and meet the requirements of different grinding and polishing processes The variable frequency motor is equipped with a frequency converter to implement soft start and soft stop, which ensures smooth speed regulation and shutdown, and has the advantages of low impact. The sun gear is driven by an independent servo motor, which enables the sun gear to accurately stop and facilitate material picking and unloading.
The internal gear ring and the sun gear are lifted and lowered independently, driven by a motor and a reducer with a trapezoidal screw rod. The lifting and lowering are smooth and without shaking. The gear ring and sun gear are lifted and lowered in a jog manner, which can control the lifting height of each gear ring and sun gear, ensuring that the entire length of the gear ring and sun gear is uniformly worn and extending their service life.
In addition to double-sided grinding and polishing, this device can also process single-sided polishing of 2.5D or 3D curved surfaces.
The electrical system is controlled by PLC, and the PT human-machine interface displays various operating parameters of the equipment. The pressure is controlled by an electrical proportional valve, making the weight and pressure control of the grinding disc more accurate
The whole machine adopts automatic timed lubrication, which improves the service life of the whole machine.
The grinding fluid tank adopts double-layer cooling, reducing product defects caused by high temperature


3、 Main technical parameters



 
Serial Number
project
parameter
one
Upper and lower grinding/polishing disc specifications
Φ 2050*Φ 630 * 65 (cast iron plate)
two
Star Wheel Specifications
Modulus m=5; Dividing circleΠ 760   Number of teeth z=152
three
Number of planetary gears placed
3≤n≤ five
four
Maximum size for grinding/polishing workpieces
Φ 710 (diagonal dimension of rectangular workpiece)
five
Grinding/polishing workpiece thickness
0.5-30mm
six
Ring gear lifting height
0-35mm
seven
Lower grinding disc speed
0-40rpm
eight
Upstream grinding disc speed
0-15rpm
nine
Sun gear speed
0-24rpm
ten
Internal gear ring speed
0-15rpm
eleven
Main gearbox
BH415S27F2N (Chunben)
twelve
Sun gear reducer
BHM215S60D1N050SX (Chunben)
thirteen
Main motor
30KW
fourteen
Sun gear motor
4KW
fifteen
Main cylinder
CS1FN300-L4131-550
sixteen
Rated power of machine tool
Approximately 38KW in total
seventeen
supply voltage
Three phase five wire AC380v
eighteen
Mpa
0.5-0.6mpa
nineteen
Equipment dimensions
3150mm*2400mm*3700mm
twenty
Equipment quality
≈ 18000KG
 
4、 Basic installation requirements
Equipment specifications and dimensions (length×); Width× Height: 3150mm * 2400mm * 3700mm
Equipment weight:& 18000kg
Equipment power:& 38KW
Power requirements:
Rated power supply voltage: three-phase 380V/50HZ;         Rated current: 588

Wire system: Three phase five wire system

Other: Reliable grounding must be ensured and kept away from interference sources such as welding machines.
Requirements for compressed air source:
Pressure: 0.6 MPa;            

Interface: Nylon tracheaΦ 10

Other: Effective drying equipment must be installed in the gas source section
Requirements for clean water sources:
Pressure: above 0.25MPa

Interface: PVC fiber braided hose 19 * 22mm
Requirements for sewage outlets:
Interface: PVC steel wire hoseΦ ninety
Cooling water requirements:
Pressure: 0.6MPA;         Temperature: 17 ℃~18 ℃;      

Interface: PVC steel wire hoseΦ 19