1、 Equipment Usage
1. This equipment can be used for simultaneous grinding and polishing of the upper and lower parallel end faces of non-metallic and metallic hard and brittle thin precision parts, such as glass, ceramic wafers, sapphire substrates, silicon wafers, sapphire substrates, and other semiconductor materials.
2、 Equipment structural characteristics
2.1. The upper and lower grinding discs are independently driven by dual frequency conversion motors, and the upper disc speed can be adjusted to ensure smooth start-up and stable operation of the whole machine. Especially at low speeds, it overcomes the phenomenon of movement and crawling of the upper and lower grinding discs.
2.2. The sun gear is independently controlled by a variable frequency motor, which can adjust the speed of the planetary gear's revolution and rotation through software, completely separating it from the lower disc motor. It is very suitable for customers to choose from various process requirements.
2.3. The internal gear ring, sun gear, and planetary gear adopt a cylindrical pin structure with involute tooth shape, which increases the strength of the planetary gear, reduces the wear of the internal gear ring and sun gear, and facilitates maintenance. The internal gear ring and sun gear are equipped with a dedicated synchronous lifting mechanism, which facilitates customers to adjust the height of the internal gear ring and sun gear synchronously.
2.4. The main load-bearing gears of the whole machine are reinforced gears, and through strict quenching and tempering treatment, the strength and stiffness of each load-bearing transmission part are greatly improved. The weight of the upper plate is 800KG, and the maximum pressure is 1200KG. At the same time, it also reduces the noise and vibration of the whole machine.
2.5. The specially designed simple gearbox replacement structure can facilitate customers to choose gearboxes with different reduction ratios based on their products, and can customize products with special speed requirements according to their products.
2.6. Using a PLC program controller to control the movement of the entire machine, the grinding disc is divided into sixteen independent control stages. The pressure and speed of each stage can be gradually increased and decreased smoothly, with a high degree of automation. The interface is matched with a professional large screen touch screen to display the current status of the entire machine, achieving human-machine dialogue and clear operation.
2.7. The main cylinder is equipped with a cross type hinge locking mechanism, which can conveniently and safely lock the grinding disc.
2.8. The transmission gear is lubricated by an automatic fuel pump at regular intervals, which is easy to maintain and has a long service life.
2.9. The standard five motor configuration scheme fully realizes independent control of synchronous lifting of the upper grinding disc, lower grinding disc, sun gear, inner gear ring, and sun gear inner gear ring, without interfering with each other. Customers are more adept at implementing various complex processes.
3、 Main technical parameters
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